Figure 5 | Vibrational Spectroscopy of Chemical Species in Silicon and Silicon-Rich Nitride Thin Films
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![PDF] Ab initio chemical kinetics for SiH2 + Si2H6 and SiH3 + Si2H5 reactions and the related unimolecular decomposition of Si3H8 under a-Si/H CVD conditions. | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/83529164926e8da1de5edcd309d6c2bf68a9b2d7/4-Table2-1.png "PDF] Ab initio chemical kinetics for SiH2 + Si2H6 and SiH3 + Si2H5 reactions and the related unimolecular decomposition of Si3H8 under a-Si/H CVD conditions. | Semantic Scholar")
PDF] Ab initio chemical kinetics for SiH2 + Si2H6 and SiH3 + Si2H5 reactions and the related unimolecular decomposition of Si3H8 under a-Si/H CVD conditions. | Semantic Scholar
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